Important APC Survey Message
Topic: Impacting Future Directions of APC
- Emerging Standard for APC and Communications to Support Virtual Metrology
- APC in emerging semiconductor-related markets
Dear APC user or provider,
The Integrated Measurement Association (IMA), a nonprofit organization chartered to help the industry in moving Advanced Process Control (APC) technology forward, is currently working with a number of organizations including the International Technology Roadmap for Semiconductors (ITRS) working groups and the SEMI Process Control Systems (PCS) task force to help guide and promote the future of APC. Specifically we have been focusing on three areas, namely (1), working with the PCS task force to develop APC technology specifications, (2) working with various organizations to determine the plausibility and roadmap for APC technologies (including run-to-run—R2R control and fault detection and classification—FDC), and (3) working with the Data Quality task force to develop consistent data quality definitions and establish a common set of metrics for assessing data quality (once established, these contributions can be used to ensure proper operation of application that rely on high data quality). In support of the first two of these efforts we are currently conducting a survey of experts such as yourself on virtual metrology extensions to PCS and applications of APC to new markets such as solar and display. We plan to collect and process the results, and present the information to the appropriate groups such as the PCS task force and ITRS working groups, so that they can better provide direction to the community.
The following few pages (see link below) contain a short fill-in-the-blank style survey to capture your thoughts on virtual metrology as well as APC emerging markets. Also, if you agree would like to schedule a short telecom with you or someone in your organization that you designate, at your convenience, to obtain follow-up input. We have found that person-to-person follow-up dialog is invaluable to this process.
We understand that information of this kind can be confidential and have tried to structure the questions so that they do not ask for sensitive information. Note that we do include an option to keep the respondent name and company confidential (within the IMA); in this case the respondent name and company will NOT be passed on to anyone outside of the IMA.
We look forward to working with you on this endeavor. Your input is critical to us providing a specification and standard that meets your needs in a cost-effective manner. Please feel free to contact us with any questions or concerns.
Take care,
James Moyne John Pace
PCS Task Force Co-Chair IMA President
Instructions:
- Download survey:
- Complete survey
- Save survey
- Email survey to john.pace@johncpace.com
